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    Cleveland State University
  Jan 21, 2018
Graduate Catalog 2017-2018
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EEC 746 - Dynamics and Control of MEMS

[4 credit(s)]
Prerequisites: EEC 510 and graduate standing. This course provides a comprehensive overview of MEMS technique and MEMS control. Topics include MEMS fabrication processes, MEMS sensors and actuators, Dynamic modeling of MEMS devices, control, signal processing, and electronics for MEMS, and case studies of MEMS.

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