Dec 26, 2024  
Graduate Catalog 2013 - 2014 
    
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Graduate Catalog 2013 - 2014 [ARCHIVED CATALOG]

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EEC 646 - Dynamics & Control of MEMS

(4 credits)
Prerequisite(s): EEC 510 and graduate standing. This course provides a comprehensive overview of MEMS technique and MEMS control. Topics include MEMS fabrication processes, MEMS sensors and actuators, Dynamic modeling of MEMS devices, control, signal processing, and electronics for MEMS, and case studies of MEMS.


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