Dec 26, 2024  
Graduate Catalog 2012 - 2013 
    
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Graduate Catalog 2012 - 2013 [ARCHIVED CATALOG]

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EEC 646 - Dynamics and Control of MEMS

(4 credits)
Prerequisite(s): EEC 510  and graduate standing. This course provides a comprehensive overview of MEMS technique and MEMS control. Topics include MEMS fabrication processes, MEMS sensors and actuators, Dynamic modeling of MEMS devices, control, signal processing, and electronics for MEMS, and case studies of MEMS.


Click here for the schedule of courses


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